Dry Pump. Roots Dry Vacuum Pump Made of Aluminum Cast Alloy and Reactive Gas Pumping.

A Case Study of Autoregressive Modelling and Order Selection for a Dry Vacuum Pump

Oil-free dry-vacuum pumps are prevalent in semiconductor plants worldwide today. The popularity of such pumps has grown over the years but little research has been done in the area of condition-monitoring of dry-vacuum pumps. Fault detection of one such pump through the use of AutoRegressive (AR) modelling technique and spectral analysis of vibration and acoustic data has been studied. The test...

CFD Simulation of a Dry Scroll Vacuum Pump Including Leakage Flows

One challenge for the numerical simulation of a dry scroll vacuum pump is the discretization of the chamber volume, which changes with time. In addition, the flow characteristics are very complex including the leakage flow caused by radial and axial gaps between the rotors and the housing. For engineers and designers it is imperative to understand the influence of such leakage flows on the effi...

MEMS Micro-vacuum Pump for Portable Gas Analyzers

There are many advantages to miniaturizing systems for chemical and biological analysis. Recent interest in this area has led to the cre ation of several research programs, including a Micro Gas Analyzer (MGA) project at MIT. The goal of this project is to develop an inexpensive, portable, real-time, and low-power approach for detect ing chemical and biological agents. Elements entering the MGA...

Cast Aluminum Alloy for High Temperature Applications

Originally developed by NASA as high performance piston alloys to meet U.S. automotive legislation requiring low exhaust emission, the novel NASA alloys now offer dramatic increase in tensile strength for many other applications at elevated temperatures from 450°F (232°C) to about 750°F (400°C). It is an ideal low cost material for cast automotive components such as pistons, cylinder heads, cyl...

Vacuum Gauge to Vacuum Pump Valve